Lab Facility

Rutgers Biomedical Engineering Department (BME) building has core facilities for conducting research in genomics and proteomics, tissue engineering, biomedical imaging and optics, microfabrication, animal study, and high-performance computing. Dr. Zahn’s research lab includes a microfabrication facility with the following equipment:

-EVG620 Optical Lithography System

-Headway PWM32 Substrate Spinner

-Kurt Lesker PVD 75 Physical Vapor Deposition System


-Xetch Xenon difluoride ecthing system

Usage Policy

General Policies and Access Procedures

Cleanroom Storage Policy

Anteroom Policy

Microscopy Room Rules


Equipment Manuals and SOPS

Mask Alignment Protocol

PVD Protocol

Profilometer Protocol

Oxygen Plasma Protocol

MicroRIE Protocol

Xenon Difluoride Etcher Protocol

Laminator Protocol



SU8 2-25 Recipe

SU8 50-100 Recipe

Shipley S1818 Recipe














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